Technology Serice Product

MEMS(Micro Electro Mechanical Systems)

MEMS (Micro-Electro-Mechanical Systems) is a general term referring to the formation of micron-scale three-dimensional structures on a supporting substrate, such as a silicon wafer, while integrating functional components like electronic circuits, sensors, and actuators. Similar to semiconductor technology, MEMS is applied in a wide range of products, including automobiles, smartphones, inkjet printer heads, and optical scanners. Due to its diverse applications, there is high demand both domestically and internationally, and it is recognized as one of the key technologies driving next-generation manufacturing.

Maryalo MEMS Technology Services

Maryalo can address MEMS-related challenges by providing surface roughness control and cleaning for bonded substrates, thinning and Total Thickness Variation (TTV) improvement for bonded wafers, and backside polishing for precise thickness control of microfabricated substrates. Additionally, we offer polishing for various materials, surface roughness enhancement, thinning technology, and cleaning solutions.