Maryalo has established a comprehensive ultra-precision
manufacturing system by utilizing a wide range of polishing machines and machining equipment.

Measurement Equipment
Laser interferometer measurement – flatness

Using a 300mm laser interferometer
Large area measurement using stitching method

0.3㎛ flatness
Φ360 area polishing and stitching measurement results

Φ360㎜ ceramic plate
Three-Dimensional Laser Interferometer
- Zygo
- Verifire HD



Laser Microscope
- KEYENCE
- VK-X3000
- Φ500 correspondence

